SNOM Test grating
Test grating for Scanning Near field
Optical Microscope is a test object made of quartz substrate partly coated with
a metal (within an active area). Metal coating is made in a form of array of
rhombs that well reflect an optical signal.
Test grating specification:
|
Manufacturer
|
IPM RAS
|
|
Substrate material
|
quartz
|
|
Substrate size
|
10 x 10 mm
|
|
Substrate thickness
|
0.5 mm
|
|
Coating (rhomb) material
|
metal
(vanadium)
|
|
Coating thickness
|
15 – 30 nm
|
|
Active area
|
central
? 3 mm
|
|
Transmission through coating
(rhomb)
|
< 20 %
|
|
Reflection from coating (rhomb)
|
> 40 %
|
|
Rhomb edge curvature radius
|
< 50 nm
|
|
|
|
|
|
|
|
Fig. SPM
image of SNOM test grating obtained with different magnifications.
|
